Ion energy and mass analyzer at radio frequency electrode in a plasma chamber

Review of Scientific Instruments

Volumn 69, Issue 4, 1998, Pages 1918-1919

  Mizutani, Naoki ^a   Nagata, Yasushi ^a   Kubo, Akira ^a   Hayashi, Toshio ^a  

^a ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000065286     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148865     Document Type: Article

References (6)

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3. A. D. Kuypers and H. J. Hopman, J. Appl. Phys. 63, 1894 (1988).
4. Y. Hikosaka, H. Hayashi, N. Mizutani, and T. Hayashi (private communication).
5. J. W. Coburn and E. Kay, J. Appl. Phys. 43, 4965 (1972).
6. N. Mizutani and T. Hayashi, Jpn. J. Appl. Phys., Part 2 36, L1470 (1997).