Uniform deposition of SiC thin films on plastics surfaces

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 665-671

  Anma, H ^a   Toki, J ^a   Ikeda, T ^a   Hatanaka, Y ^b  

^a Koito Manufacturing Co Ltd   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000019326     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00331-6     Document Type: Article

References (6)

1. Sano K, Tamamaki H, Nomura M, Wickramanayaka S, Nakanishi Y, Hatanaka Y. Mater Res Soc Symp Proc 1996;396:539.
2. Wrobel AM, Wickramanayaka S, Hatanaka Y. J Appl Phys 1994;76:558.
3. Wickaramanayaka S, Nakanisi Y, Hatanaka Y, Worobel AM. J Electrochem Soc 1994;141:2910.
4. Kawai Y. In: Saishin prazuma hatusei giyutu (Japanese). IPC Corporation, 1991: 119-187 (in Japanese).
5. Jayatissa AH, Nakanisi Y, Hatanaka Y. Jpn J Appl Phys 1993;32:3729.
6. Sano K, Nomura M, Hatanaka Y, Nakanishi Y. IEICE. Tech Rep Jpn 1996;96:11.