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Volumn 69, Issue 16, 1996, Pages 2403-2405
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Low off-state leakage current thin-film transistor using Cl incorporated hydrogenated amorphous silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0038144439
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.117651 Document Type: Article |
Times cited : (18)
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References (12)
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