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Volumn 118, Issue 1, 2005, Pages 44-48

Evaluation of mechanical quality of field-assisted diffusion bonding by ultrasonic nondestructive method

Author keywords

Bonding ratio; Field assisted diffusion bonding; Mechanical quality; Ultrasonic nondestructive testing

Indexed keywords

BONDING; DATA REDUCTION; ELECTRIC POTENTIAL; FRACTURE TOUGHNESS; STRENGTH OF MATERIALS; TENSILE TESTING; THERMAL DIFFUSION; ULTRASONIC TESTING;

EID: 9944252324     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(04)00487-X     Document Type: Article
Times cited : (22)

References (13)
  • 2
    • 0014563672 scopus 로고
    • Field assisted glass-metal sealing
    • G. Wallis, D.I. Pomerantz, Field assisted glass-metal sealing, J. Appl. Phys. 40 (1969) 3946-3950.
    • (1969) J. Appl. Phys. , vol.40 , pp. 3946-3950
    • Wallis, G.1    Pomerantz, D.I.2
  • 4
    • 0025698073 scopus 로고
    • A capacitive pressure sensor with low impendence output and active suppression of parasitic effect
    • B. Puers, E. Peelers, A. Van Den Bossche, W. Sansen, A capacitive pressure sensor with low impendence output and active suppression of parasitic effect, Sens. Actuators A21-A23 (1990) 108-114.
    • (1990) Sens. Actuators , vol.A21-A23 , pp. 108-114
    • Puers, B.1    Peelers, E.2    Van Den Bossche, A.3    Sansen, W.4
  • 7
    • 9944258273 scopus 로고
    • Electrostatic bonding of silicon solar cells
    • 2-6 September Florence, Italy
    • P.A. White, Electrostatic bonding of silicon solar cells, in: Proceedings of second ESPC, 2-6 September 1991, Florence, Italy, pp. 575-580.
    • (1991) Proceedings of Second ESPC , pp. 575-580
    • White, P.A.1
  • 8
    • 0026226614 scopus 로고
    • Tensile strength characterization of low-temperature fusion-bonded silicon wafers
    • B. Muller, A. Stoffel, Tensile strength characterization of low-temperature fusion-bonded silicon wafers, J. Micromecha. Microeng. 1 (1991) 161-166.
    • (1991) J. Micromecha. Microeng. , vol.1 , pp. 161-166
    • Muller, B.1    Stoffel, A.2
  • 10
    • 0031145706 scopus 로고    scopus 로고
    • Non-destructive in situ test for anodic bonding
    • A. Jose. Plaza, Jaume Esteve, Emilio Lora-Tamayo, Non-destructive in situ test for anodic bonding, Sens. Actuators A60 (1997) 176-180.
    • (1997) Sens. Actuators , vol.A60 , pp. 176-180
    • Jose, A.1    Plaza, J.E.2    Lora-Tamayo, E.3
  • 11
    • 0033537532 scopus 로고    scopus 로고
    • Experimental evaluation of anodic bonding process based on the Taguchi analysis of interfacial fracture toughness
    • Jeung sang Go, Young-Ho Cho, Experimental evaluation of anodic bonding process based on the Taguchi analysis of interfacial fracture toughness, Sens. Actuators A73 (1999) 52-57.
    • (1999) Sens. Actuators , vol.A73 , pp. 52-57
    • Go, J.S.1    Cho, Y.-H.2
  • 12
    • 0004409820 scopus 로고    scopus 로고
    • Low-temperature anodic bonding of silicon to silicon wafers by z means of intermediate glass layers
    • A. Grelach, D. Maas, D. Seidel, H. Bartuch, S. Schundau, K. Kaschlik, Low-temperature anodic bonding of silicon to silicon wafers by z means of intermediate glass layers, Microsyst. Technol. 5 (1999) 144-149.
    • (1999) Microsyst. Technol. , vol.5 , pp. 144-149
    • Grelach, A.1    Maas, D.2    Seidel, D.3    Bartuch, H.4    Schundau, S.5    Kaschlik, K.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.