Selective MOVPE growth of tilted arrayed waveguides from [0 1 1] direction

Journal of Crystal Growth

Volumn 272, Issue 1-4 SPEC. ISS., 2004, Pages 582-587

  Kawakita, Yasumasa ^a   Kawai, Akira ^a   Shimotaya, Suguru ^a   Shimomura, Kazuhiko ^a  

^a SOPHIA UNIVERSITY   (Japan)

Author keywords

A3. Metalorganic vapor phase epitaxy; A3. Quantum wells; A3. Selective epitaxy; B2. Semiconducting indium compounds; B3. Waveguide array

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEMULTIPLEXING; ETCHING; LIGHT AMPLIFIERS; METALLORGANIC VAPOR PHASE EPITAXY; ORGANIC SOLVENTS; REFRACTIVE INDEX; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR QUANTUM WELLS; SILICA;

ASYMMETRIC STRUCTURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); SELECTIVE EPITAXY; WAVEGUIDE ARRAY;

WAVEGUIDES;

EID: 9944235716     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.08.094     Document Type: Conference Paper

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