Morphological and structural study of ultra thin Al films on polymer substrate

Superlattices and Microstructures

Volumn 36, Issue 1-3, 2004, Pages 79-86

  Prosycevas I ^a   Tamulevicius S ^a,b   Guobiene, A ^a,b   Cyziute B ^b   Iljinas, A ^b   Andrulevicius M ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; METALLIZING; MOLECULAR STRUCTURE; MORPHOLOGY; NUCLEATION; OPACITY; POLYETHYLENE TEREPHTHALATES; THIN FILM TRANSISTORS; ULTRATHIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ION-BEAM MAGNETRON SPUTTERING; MORPHOLOGICAL CHANGES; POLYMER METALLIZATION; THERMAL EVAPORATION;

NANOSTRUCTURED MATERIALS;

EID: 9644288242     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2004.08.008     Document Type: Article

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