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Volumn 24, Issue 1, 1996, Pages 18-
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Study on excitation temperatures of a novel microwave plasma enhanced glow discharge source
a
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Author keywords
Excitation temperature; Glow discharge source; Microwave plasma
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Indexed keywords
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EID: 9644279653
PISSN: 02533820
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (1)
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References (5)
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