Chemical vapor deposition of niobium in the NbCl 5-H 2-O 2 system

Inorganic Materials

Volumn 38, Issue 9, 2002, Pages 895-899

  Kobyakov, V P ^a  

^a INSTITUTE OF STRUCTURAL MACROKINETICS AND MATERIALS SCIENCE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; NIOBIUM; NIOBIUM CHLORIDE; OXYGEN; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL COMPOSITION; CHEMICAL STRUCTURE; HARDNESS; HEATING; VAPOR;

EID: 9444279618     PISSN: 00201685     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1020034006969     Document Type: Article

References (18)

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