Virtual modeling and optimal design of intelligent micro-accelerometers

Lecture Notes in Artificial Intelligence (Subseries of Lecture Notes in Computer Science)

Volumn 3070, Issue , 2004, Pages 942-947

  Wiak, Slawomir ^a,b   Cader, Andrzej ^b   Drzymala, Pawel ^a   Welfle, Henryk ^a  

^a LODZ UNIVERSITY OF TECHNOLOGY   (Poland)

^b Wyzsza Szkola Humanistyczno Ekonomiczna w Lodzi   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

COMBINATORIAL MATHEMATICS; COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; ELECTRONIC COMMUNITIES; MATHEMATICAL TRANSFORMATIONS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

INTELLIGENT MICRO-ACCELEROMETERS; OPTIMAL DESIGN; OPTIMIZATION TECHNIQUES; VIRTUAL MODELING;

ACCELEROMETERS;

EID: 9444234542     PISSN: 03029743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-24844-6_146     Document Type: Conference Paper

References (7)

1. Wiak S.: Intelligent Micro-Electro-Mechanical Systems (IMEMS) - Modelling and Optimal Design, AI-METH 2003 - Artificial Intelligence Methods, Gliwice, Poland (2003).
2. OPERA-3D User Guide, Vector Fields Limited, Oxford, England, ver. 9.0, (2004).
3. Wiak S., Rudnicki M.: Optimisation and Inverse Problems in Electromagnetism. Kluwer, Academic Publisher (2003).
4. Brown K.S.: On the Feasibility of Integrated Optical Waveguidebased In-Situ Monitoring of Microelectromechanical Systems (MEMS), dissertation Phd in engineering, Department of Computer Science and Electrical Engineering Morgantown, West Virginia 2000.
5. Tang W. C., Nguyen T.-C. H., Judy M. W., and Howe R. T.: Electrostatic Comb Drive of Lateral Polysilicon Resonators, Sensors and Actuators A, 21 (1990) 328-331.
6. Yong Zhou (advisor: prof. Gary K. Fedder, co-advisor: dr. Tamal Mukherjee): Layout Syn-thesis of Accelerometers, MS Project Report, Department of Electrical and Computer Engi-neering, Carnegie Mellon university, August, 1998
7. Wiak S., Smolka K.: Electrostatic Comb Accelerometer - Field and Equivalent Circuit Mod-eling, COMPUMAG 2003, Saratoga Springs, USA, July 2-5, 2003.