SCOPUS 정보 검색 플랫폼

EPJ Applied Physics

Volumn 28, Issue 2, 2004, Pages 235-242

Deposition of optical coatings with real time control by the spectroellipsometry

(4) Bulkin, P a Daineka, D a Kouznetsov, D a Drevillon B a

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CONTROL SYSTEMS; ELLIPSOMETRY; FILM GROWTH; PARAMETER ESTIMATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REAL TIME SYSTEMS; REFRACTIVE INDEX; THIN FILMS;

CONTROL STRATEGIES; FABRICATION PROCESSES; PHASE SENSITIVITY; REFLECTION SPECTROSCOPY;

OPTICAL COATINGS;

EID: 9244229585 PISSN: 12860042 EISSN: None Source Type: Journal
DOI: 10.1051/epjap:2004191 Document Type: Article

Times cited : (6)

References (21)

1
- 0343953435
- R. Brenot, B. Drévillon, P. Bulkin, P. Roca i Cabarrocas, R. Vanderhaghen, Appl. Surf. Sci. 154-155, 283 (2000)
- (2000) Appl. Surf. Sci. , vol.154-155 , pp. 283
- Brenot, R.¹ Drévillon, B.² Bulkin, P.³ Roca i Cabarrocas, P.⁴ Vanderhaghen, R.⁵

2
- 0005814730
- M. Kildemo, P. Bulkin, B. Drévillon, O. Hunderi, Appl. Opt. 36, 6352 (1997)
- (1997) Appl. Opt. , vol.36 , pp. 6352
- Kildemo, M.¹ Bulkin, P.² Drévillon, B.³ Hunderi, O.⁴

3
- 0036684524
- D. Kouznetsov, A. Hofrichter, B. Drévillon, Appl. Opt. 41, 4510 (2002)
- (2002) Appl. Opt. , vol.41 , pp. 4510
- Kouznetsov, D.¹ Hofrichter, A.² Drévillon, B.³

4
- 0036685453
- A. Hofrichter, D. Kouznetsov, P. Bulkin, B. Drévillon, Appl. Opt. 41, 4519 (2002)
- (2002) Appl. Opt. , vol.41 , pp. 4519
- Hofrichter, A.¹ Kouznetsov, D.² Bulkin, P.³ Drévillon, B.⁴

5
- 21144480349
- S. Henk, W. Duncan, L.M. Lowenstein, S.W. Butler, J. Vac. Sci. Technol. A 11, 1179 (1993)
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 1179
- Henk, S.¹ Duncan, W.² Lowenstein, L.M.³ Butler, S.W.⁴

6
- 17544402622
- D.E. Aspnes, N. Dietz, Appl. Surf. Sci. 130-132, 367 (1998)
- (1998) Appl. Surf. Sci. , vol.130-132 , pp. 367
- Aspnes, D.E.¹ Dietz, N.²

7
- 21144484082
- D.E. Aspnes, W.E. Quinn, M.C. Tamargo, S. Gregory, S.A. Schwarz, M.A.A. Pudensi, M.J.S.P. Brasil, R.E. Nahory, J. Vac. Sci. Technol. A 10, 1840 (1992)
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1840
- Aspnes, D.E.¹ Quinn, W.E.² Tamargo, M.C.³ Gregory, S.⁴ Schwarz, S.A.⁵ Pudensi, M.A.A.⁶ Brasil, M.J.S.P.⁷ Nahory, R.E.⁸

8
- 0034186943
- J.A. Roth, W.S. Williamson, D.H. Chow, G.L. Olsori. B. Johs, J. Vac. Sci. Technol. B 18, 1439 (2000).
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1439
- Roth, J.A.¹ Williamson, W.S.² Chow, D.H.³ Olsori, G.L.⁴ Johs, B.⁵

9
- 0034187724
- M. Beaudoin, E. Grassi. S.R. Johnson, K. Ramaswamy, K. Tsakalis, T.L. Alford, Y.-H. Zhang, J. Vac. Sci. Technol. B 18, 1435 (2000)
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1435
- Beaudoin, M.¹ Grassi, E.² Johnson, S.R.³ Ramaswamy, K.⁴ Tsakalis, K.⁵ Alford, T.L.⁶ Zhang, Y.-H.⁷

10
- 0036494581
- P. Bulkin, A. Hofrichter, T. Heitz, J. Hue, B. Drévillon, J.J. Benattar, J. Vac. Sci. Technol. A 20, 338 (2001)
- (2001) J. Vac. Sci. Technol. A , vol.20 , pp. 338
- Bulkin, P.¹ Hofrichter, A.² Heitz, T.³ Hue, J.⁴ Drévillon, B.⁵ Benattar, J.J.⁶

11
- 0028416884
- J. Pelletier, T. Lagard, Thin Solid Films 241, 240 (1994)
- (1994) Thin Solid Films , vol.241 , pp. 240
- Pelletier, J.¹ Lagard, T.²

12
- 1842865680
- D. Daineka, P. Bulkin, G. Girard, J.-E. Bourée, B. Drévillon, Eur. Phys. J. Appl. Phys. 26, 3 (2004)
- (2004) Eur. Phys. J. Appl. Phys. , vol.26 , pp. 3
- Daineka, D.¹ Bulkin, P.² Girard, G.³ Bourée, J.-E.⁴ Drévillon, B.⁵

13
- 0003415938
- Adam Higler, Bristol
- H.A. Macleod, Thin Film Optical Filters, 2nd edn. (Adam Higler, Bristol, 1986)
- (1986) Thin Film Optical Filters, 2nd Edn.
- Macleod, H.A.¹

14
- 77949408973
- B.T. Sullivan, J.A. Dobrowolski, Appl. Opt. 32, 2351 (1993)
- (1993) Appl. Opt. , vol.32 , pp. 2351
- Sullivan, B.T.¹ Dobrowolski, J.A.²

15
- 0043028812
- B.T. Sullivan, G.A. Clarke, T. Akiyama, N. Osborn, M. Ranger, J.A. Dobrowolski, L. Howe, A. Matsumoto, Y. Song, K. Kikuchi, Appl. Opt. 39, 157 (2000)
- (2000) Appl. Opt. , vol.39 , pp. 157
- Sullivan, B.T.¹ Clarke, G.A.² Akiyama, T.³ Osborn, N.⁴ Ranger, M.⁵ Dobrowolski, J.A.⁶ Howe, L.⁷ Matsumoto, A.⁸ Song, Y.⁹ Kikuchi, K.¹⁰

16
- 0027882071
- B. Drévillon, Prog. Cryst. Growth Charact. Mater. 27, 1 (1993)
- (1993) Prog. Cryst. Growth Charact. Mater. , vol.27 , pp. 1
- Drévillon, B.¹

17
- 0001370233
- F. Abeles, Ann. Phys. (Paris) 5, 596 (1950)
- (1950) Ann. Phys. (Paris) , vol.5 , pp. 596
- Abeles, F.¹

18
- 0000409202
- M. Kildemo, P. Bulkin, S. Deniau, B. Drévillon, Appl. Phys. Lett. 68, 3395 (1996)
- (1996) Appl. Phys. Lett. , vol.68 , pp. 3395
- Kildemo, M.¹ Bulkin, P.² Deniau, S.³ Drévillon, B.⁴

19
- 0036565337
- A. Hofrichter, T. Heitz, P. Bulkin, B. Drévillon, J. Vac. Sci. Technol. A 20, 702 (2002)
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 702
- Hofrichter, A.¹ Heitz, T.² Bulkin, P.³ Drévillon, B.⁴

20
- 0009966298
- M. Kildemo, Appl. Opt. 37, 113 (1998)
- (1998) Appl. Opt. , vol.37 , pp. 113
- Kildemo, M.¹

21
- 9244240952
- submitted
- D. Daineka, D. Kouznetsov, P. Bulkin, G. Girard, J.-E. Boureé, B. Drévillon, Eur. Phys. J. Appl. Phys. (submitted)
- Eur. Phys. J. Appl. Phys.
- Daineka, D.¹ Kouznetsov, D.² Bulkin, P.³ Girard, G.⁴ Boureé, J.-E.⁵ Drévillon, B.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.