Condensation of silanol groups in porous methylsilsesquioxane films using supercritical CO2 and alcohol cosolvents

IEEE Transactions on Semiconductor Manufacturing

Volumn 17, Issue 4, 2004, Pages 544-553

  Xie, Bo ^a   Muscat, Anthony J ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

Alcohol; Condensation; Contact angle; Cosolvent; Fourier transform infrared (FTIR); Porous methylsilsesquioxane; Silanol; Spectroscopy; Supercritical CO 2; Ultralow k (ULK); Water

Indexed keywords

ALCOHOLS; CHEMICAL BONDS; CONDENSATION; CONTACT ANGLE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; POROUS SILICON; SUPERCRITICAL FLUIDS;

COSOLVENTS; GONIOMETRY; POROUS METHYLSILSESQUIOXANE; SILANOL;

SILANES;

EID: 9144225609     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2004.837003     Document Type: Article

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