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Volumn 5484, Issue , 2004, Pages 475-481
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Diffractive elements with extended depth of focus
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Author keywords
Diffractive elements; Extended depth of focus; Point spread function
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Indexed keywords
COMPUTER SIMULATION;
ELECTROMAGNETIC WAVE DIFFRACTION;
ELECTRON BEAM LITHOGRAPHY;
FOCUSING;
LENSES;
MICROSCOPIC EXAMINATION;
DIFFRACTIVE ELEMENTS;
EXTENDED DEPTH OF FOCUS;
POINT SPREAD FUNCTIONS;
DIFFRACTIVE OPTICS;
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EID: 8844274132
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.568903 Document Type: Conference Paper |
Times cited : (7)
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References (5)
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