A laboratory information management system (LIMS) for an undergraduate microchip fabrication facility

ASEE Annual Conference Proceedings

Volumn , Issue , 2001, Pages 539-547

  Eckerman, Paul D ^a   Hendricks, Robert W ^a,b  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^b Ctr Microlectron Optoelectron/N   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANROOM PERFORMANCE; LABORATORY INFORMATION MANAGEMENT SYSTEM (LIMS); LOG WAFER PROCESSING; MICROCHIP FABRICATION;

DATA ACQUISITION; ENGINEERING EDUCATION; INDUSTRIAL ENGINEERING; INFORMATION ANALYSIS; LABORATORIES; MICROPROCESSOR CHIPS; STUDENTS; WSI CIRCUITS;

MANAGEMENT INFORMATION SYSTEMS;

EID: 8744318356     PISSN: 01901052     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. R. W. Hendricks, An Undergraduate Microchip Fabrication Facility, (this symposium).
2. J. G. King, The Design of Cleanrooms for the Microelectronics Industry, Ch 3 in Cleanroom Design (2E), W. Whyte, ed., John Wiley & Sons: Chichester, UK (1999), pp. 51-78.
3. D. T. Gray and R. W. Hendricks, A Simplified Semiconductor Parameter Analysis System for an Undergraduate Microchip Fabrication Facility, (2001, to be published).
4. th Biennial University/Government/Industry Microelectronics (UGIM) Symposium, Richmond, VA, June 18-21, 2001.