High precision positioning stages for micro/nano-lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3225, Issue , 1997, Pages 68-75

  Croft, D ^a   Devasia, S ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

Dynamic inversion; Hysteresis nonlinearities; Piezoceramic Actuators; Scanning probe microscopy

Indexed keywords

ACTUATORS; MICROMACHINING; PIEZOELECTRIC CERAMICS; SCANNING PROBE MICROSCOPY; STRUCTURAL DYNAMICS;

DYNAMIC INVERSION; FUNDAMENTAL LIMITATIONS; HIGH PRECISION POSITIONING; HYSTERESIS NON LINEARITIES; MICRO /NANO FABRICATIONS; PIEZO-CERAMIC ACTUATORS; POSITIONING SYSTEM; PRECISION TRACKING;

HYSTERESIS;

EID: 8744317689     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.284555     Document Type: Conference Paper

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