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Volumn 88, Issue , 2003, Pages 1059-1061
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Micro-pillar square resonant cavity channel add-drop filters on silicon-nitride-on-silica: Design, fabrication and characterization
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Author keywords
[No Author keywords available]
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Indexed keywords
CAVITY RESONATORS;
INTEGRATED CIRCUITS;
LIGHT POLARIZATION;
MICROSTRUCTURE;
OPTICAL FILTERS;
OPTICAL WAVEGUIDES;
PHOTONS;
PLASMA ETCHING;
SILICA;
SILICON NITRIDE;
ALL-OPTICAL DEVICES;
INTEGRATED OPTIC DEVICE;
MICROSTRUCTURE DEVICES;
MICROSTRUCTURE FABRICATION;
PHOTONIC INTEGRATED CIRCUITS;
INTEGRATED OPTICS;
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EID: 8744314153
PISSN: 10945695
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (2)
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