Thinned backside illuminated ccds for ultraviolet, soft x-ray and electron-beam imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1140, Issue , 1989, Pages 139-148

  Tassin, C ^a   Thenoz, Y ^a   Lemaitre, R ^a   Chabbal, J ^a  

^a THALES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASTROPHYSICS; BINARY ALLOYS; EFFICIENCY; QUANTUM EFFICIENCY; SYNCHROTRON RADIATION; SYNCHROTRONS;

BACKSIDE ILLUMINATED CCDS; BACKSIDE ILLUMINATION; ELECTRON BEAM IMAGING; FRAME TRANSFER CCD; HIGH QUANTUM EFFICIENCY; LASER ANNEALING; SOFT X-RAY; THOMSON;

X RAYS;

EID: 8744249007     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.961814     Document Type: Conference Paper

References (12)

1. S. M., Semiconductor Devices: Physics and Technology, JOHN WILEY & SONS, NEW YORK, 1985, pp. 191 - 197.
2. R. A. Stern, R. C. Catura, MM. Blouke, M. Winzenread, Proc. SPIE 627, 583 - 590 (1986).
3. J. Janesick, T. Eliott, T. Daud, J. MC. Carthy, M. Blouke, Proc. SPIE 570, 46-79 (1985).
4. J. Janesick, T. Eliott, T. Daud, D. Campbell, Proc. SPIE 627, 543 - 582 (1986).
5. J. Janesick, T. Eliott, G. Fraschetti, S. Collins, M. Blouke, B. Corsie, SPIE, Optical Sensors and Electronic Photography, Los Angeles, January 1989.
6. R. Stern, R. Catura, R. Kimble, A. Davidsen, M. Winzenread, M. Blouke, R. Hayes, D. Walton, J. Culhane, Opt. Eng. 26 (9), 875-883 (1987).
7. C. Tassin, Y. Thenoz, J. Chabbal, SPIE 1988 Technical Symposium Southeast on Optics, Electro-optics and Sensors, Orlando, Florida, april 1988.
8. J. Janesick, T. Eliott, S. Collins, M. Blouke, J. Freeman Optical Eng. 26 (8) 692 - 714 (1987).
9. E. Palik “Handbook of Optical Constants of Solids” Academic Press (1985).
10. D. Aspnes and A. Studna, Phys. Rev. B 27, 985 (1983).
11. O. Christensen, J. Appl. Phys. 47 (2), 689 (1976).
12. J. F. Hochedez, P. Lemaire, J. P. Delaboudiniere, B. Cougrand, J. Barba, SPIE Los Angeles, January 1989, preprint.