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Volumn 99-100, Issue , 2004, Pages 259-262
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Properties of TiO2 films prepared by the spray pyrolysis method
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Author keywords
Electrical properties; Spray pyrolysis; Structure
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
PYROLYSIS;
SOL-GELS;
STRUCTURE (COMPOSITION);
TITANIUM COMPOUNDS;
X RAY DIFFRACTION ANALYSIS;
ACETONE;
CRYSTALLINE MATERIALS;
ELECTRIC PROPERTIES;
HIGH-K DIELECTRIC;
OXIDE MINERALS;
REFRACTIVE INDEX;
SILICON WAFERS;
SPRAY PYROLYSIS;
THICK FILMS;
THIN FILMS;
TITANIUM DIOXIDE;
ELECTRICAL PROPERTIES;
SPRAY PYROLYSIS;
TIO2;
ANATASE FORMATION;
ANATASE TIO2 FILMS;
AS-DEPOSITED FILMS;
CRYSTALLINE FILMS;
RELATIVE DIELECTRIC CONSTANT;
SPRAY PYROLYSIS METHOD;
SUBSTRATE TEMPERATURE;
THIN FILMS;
FILM PREPARATION;
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EID: 8644268919
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (49)
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References (9)
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