Integration of low k spin-on polymer (SOP) using electron beam cure for non-etch-back application

Proceedings of the IEEE 1998 International Interconnect Technology Conference, IITC 1998

Volumn 1998-June, Issue , 1998, Pages 217-219

  Hui, Jane C Id ^a   Xu, Yi ^a   Foong, Chow Yeog ^a   Marvin, Liao ^b   Charles, Lin ^b   Shung, Lin Yih ^b   Inamdar, Amit ^c   Yang, Jingjun ^c   Kennedy, Joseph ^c   Ross, M ^c   Wang, Shi Qing ^c  

^a CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c HONEYWELL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; ELECTRON BEAMS; INTEGRATION;

DIELECTRIC-CONSTANT MEASUREMENTS; ELECTRON BEAM CURES; ELECTRON BEAM CURING; FILM PROPERTIES; FILM-MODIFICATION; INTEGRATION PROCESS; SPIN ON DIELECTRICS; VIA RESISTANCE;

LOW-K DIELECTRIC;

EID: 8644262160     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.1998.704903     Document Type: Conference Paper

References (8)

1. [l] L. Forester, M. Cleeves, K. Ramkumar, D. K. Choi, M. Ross, and W. R. Livesay, in Proceedings of the 12th International VLSI Multilevel Interconnection Conference (VMIC), Santa Clara, 83 (1995).
2. J. Kennedy, D. K. Choi, L. Forester, M. Ross, and W. R. Livesay, Proceedings of Intemational Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, CA, (1 996).
3. J. J. Yang, L. Forester, D. K. Choi, M. Ross in Proceedings of Advanced Metallization and Interconnect Systems for ULSI Applications in 1996, Boston, 505 (1997).
4. J. J. Yang, S.Q. Wang, L. Forester and M. Ross in Proceedings of Advanced Metallization and Interconnect Systems for ULSI Applications in 1997, San Diego, To be published (1998).
5. N.P. Hacker, J.S. Drage, R. Katsanes and P. Sebahar in Proceedings of the 12th International VLSI Multilevel Interconnection Conference (VMIC), Santa Clara, 138 (1 995).
6. W. R. Livesay, J. Vac. Sci. & Tech., B, 11(6), 2304 (1993).
7. J.J. Yang, Unpublished Work.
8. Takayasu Sakurai, "Closed-Form Expressions for Interconnection Delay, Coupling, and Crosstalk in VLSIs", IEEE Transactions on Electron Devices, Vol. 40, No. 1, January 1993, P. 1 18-124.