Development of sol-gel MgO thin films for SiC insulation applications

Materials Science Forum

Volumn 457-460, Issue II, 2004, Pages 1373-1376

  Bondoux, C ^a   Prene P ^a   Belleville, P ^a   Guillet, F ^a   Jerisian R ^b  

^a CEA LE RIPAULT   (France)

^b STMICROELECTRONICS   (France)

Author keywords

Dielectric; Leakage current; MIM; Schottky barrier; Sol gel; Thin MgO films

Indexed keywords

CRYSTAL ORIENTATION; CURRENT VOLTAGE CHARACTERISTICS; DIELECTRIC MATERIALS; ELECTRIC INSULATION; LEAKAGE CURRENTS; MAGNESIA; OHMIC CONTACTS; SCHOTTKY BARRIER DIODES; SILICON CARBIDE; SOL-GELS; X RAY DIFFRACTION ANALYSIS;

MIM; SOL-GEL COATING PROCESSES; THIN MGO FILMS; VACUUM DEPOSITION;

THIN FILMS;

EID: 8644245928     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.457-460.1373     Document Type: Conference Paper

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