Thickness distribution of thin films deposited by ion beam sputtering

Optics InfoBase Conference Papers

Volumn , Issue , 2001, Pages

  Lee, Cheng Chung ^a   Chuang, Kie Pin ^a   Wu, Jean Yee ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FIBER OPTIC SENSORS; ION BEAM ASSISTED DEPOSITION; ION BEAMS; SPUTTERING;

B-Y IONS; DEPOSITION PARAMETERS; ION-BEAM-SPUTTERING; OPTICAL THIN FILMS; THICKNESS DISTRIBUTIONS; THIN-FILMS; VIRTUAL SOURCES;

THIN FILMS;

EID: 85135900840     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. R. J. Hill, “Evaporated Aluminum Films: A Review of Techniques and Recent Improvement”, Temescal, Berkeley, CA. 1971.