VISCOUS EFFECTS IN SUPERSONIC MEMS-FABRICATED MICRONOZZLES

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1998-AE, Issue , 1998, Pages 117-123

  Bayt, Robert L ^a   Breuer, Kenneth S ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIRCRAFT ENGINES; BOUNDARY LAYERS; EFFICIENCY; GAS TURBINES; NOZZLES; REACTIVE ION ETCHING; REYNOLDS NUMBER;

3-5 MICRON; DEEP REACTIVE ION ETCHING; DEEP REACTIVE-ION ETCHINGS; EXPERIMENTAL ERRORS; FLOW EFFICIENCY; MASS FLOW; MICRONOZZLE; SUPERSONIC VELOCITIES; TWO-DIMENSIONAL; VISCOUS EFFECT;

NAVIER STOKES EQUATIONS;

EID: 85125011168     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1998-1231     Document Type: Conference Paper

References (8)

1. Ayon, A. A., Bayt, R. L., Lin, C. C., Braff, R. A., Sawin, H. H., Schmidt, M. A., 1998, “Etching Characteristics and Profile Control in a Time Multiplexed Inductively Coupled Plasma Etcher”, Sensors and Actuators Workshop, Hilton Head pp. 41-44.
2. Bayt, R. L., Ayon, A. A., and Breuer, K.S., 1997, “A Performance Evaluation of MEMS-based Micronozzles”, 33rd AIAA Joint Propulsion Conference, AIAA Paper 97-3169.
3. Bayt, R. L., Breuer, K.S., and Ayon, A. A., 1998, “DRIE-Fabricated Nozzles for Generating Supersonic Flows in Micropropulsion Systems”, Sensors and Actuators Workshop, Hilton Head, pp. 312-315.
4. Bosch, R., “Method for anisotropically etching silicon”, US Patents 4855017, 4789720, Germany Patent 42410450.
5. Grisnik, S. P., Smith T. A., Salz L. E., 1987 'Experimental Study of Low Reynolds Number Nozzles”, International Electric Propulsion Conference AIAA Paper 87-0092.
6. Janson, S. W., and Helvajian H., 1996 “Batch-Fabricated Microthrusters: Initial Results”, 32nd AIAA Joint Propulsion Conference AIAA Paper 96-2988.
7. Mack, L. M., 1984, “Boundary-Layer Linear Stability Theory”, Special Course on Stability and Transition of Laminar Flow, AGARD Report 709.
8. Wallis, G. and Pomerantz, D. I., 1969, “Field Assisted Glass-Metal Sealing”, Journal of Applied Physics, Vol. 40, No. 10, pp. 3945-3949.