High aspect ratio, high resolution ceramic MEMS

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 39-44

  Routkevitch, Dmitri ^a   Govyadinov, Alexander N ^a   Mardilovich, Peter P ^a  

^a Nanomaterials Research Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; CERAMIC MATERIALS; CHEMICAL STABILITY; COMPOSITE MICROMECHANICS; MECHANICAL STABILITY; MICROMACHINING;

'CURRENT; APPLICATION ENVIRONMENT; HIGH ASPECT RATIO; HIGH RESOLUTION; HIGH THERMAL; ION MILLING; MICRO PROCESSING; MICROMETER SCALE; MICROMETER-SCALE; ULTRAPRECISION MACHINING;

ASPECT RATIO;

EID: 85119993323     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1068     Document Type: Conference Paper

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