Laser marking of materials by means of micro mirror array

ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Volumn , Issue , 2002, Pages

  Kuntze, Thomas ^a   Panzner, Michael ^a   Klotzbach, Udo ^a   Beyer, Eckhard ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLAY DEVICES; EXCIMER LASERS; LASER MIRRORS; LASER PULSES; MARKING MACHINES; MICROELECTRONICS; OPTICAL SYSTEMS; PACKAGING MATERIALS; PULSED LASERS;

LASER-MARKING PROCESS; MASK PROJECTION TECHNIQUES; MICRO MIRROR DEVICES; MICROELECTRONIC CIRCUITS; PACKAGING INDUSTRY; PULSE FREQUENCIES; SHORT WAVELENGTHS; SHORT-PULSE LASERS;

LASER MATERIALS PROCESSING;

EID: 85088685612     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5066189     Document Type: Conference Paper

References (3)

1. Lauterborn, W. Coherent Optics. Berlin Heidelberg New York: Springer Verlag, 1993
2. Stößel, W. Fourier Optics. Berlin Heidelberg New York: Springer Verlag, 1993
3. Kuntze, T. Experimentelle Realisierung eines Aufbaus zur Excimerlaserbearbeitung mittels reflektiver Phasenmaske. Dresden: Diplomarbeit, 2001