메뉴 건너뛰기




Volumn , Issue , 1996, Pages

A silicon micromachined sensor for shear stress measurements in aerodynamic flows

Author keywords

[No Author keywords available]

Indexed keywords

AEROSPACE ENGINEERING; AIR; ATMOSPHERIC THERMODYNAMICS; BOUNDARY LAYER FLOW; LAMINAR BOUNDARY LAYER; LAMINAR FLOW; SHEAR FLOW; SILICON;

EID: 85086950536     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.1996-422     Document Type: Conference Paper
Times cited : (6)

References (17)
  • 3
    • 0026881526 scopus 로고
    • A microfabricated floating-element shear stress sensor using wafer-bonding technology
    • J. Shajii, K. Y. Ng and M. A. Schmidt", A microfabricated floating-element shear stress sensor using wafer-bonding technology, J-MEMS, pp. 89-94, 1992.
    • (1992) J-MEMS , pp. 89-94
    • Shajii, J.1    Ng, K.Y.2    Schmidt, M.A.3
  • 9
    • 0028445049 scopus 로고
    • Viscous damping model for laterally oscillating microstructures
    • Y-H. Cho, A. P. Pisano, and R. T. Howe", Viscous damping model for laterally oscillating microstructures", J-MEMS, pp. 81-86, 1994.
    • (1994) J-MEMS , pp. 81-86
    • Cho, Y.-H.1    Pisano, A.P.2    Howe, R.T.3
  • 13
    • 0042284861 scopus 로고
    • Micromachined structures fabricated using a wafer-bonded sealed cavity process
    • Technical Digest
    • C. Hsu and M. A. Schmidt", Micromachined structures fabricated using a wafer-bonded sealed cavity process", Technical Digest, Solid-State Sensor and Actuator Workshop, pp. 151-155, 1994.
    • (1994) Solid-State Sensor and Actuator Workshop , pp. 151-155
    • Hsu, C.1    Schmidt, M.A.2
  • 17
    • 0029323834 scopus 로고
    • Stochastic calibration of sensors in turbulent flow fields
    • K. S. Breuer", Stochastic calibration of sensors in turbulent flow fields", Experiments in Fluids, Vol. 19, No. 2, pp. 138-141, 1995.
    • (1995) Experiments in Fluids , vol.19 , Issue.2 , pp. 138-141
    • Breuer, K.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.