SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Materials Science Forum

Volumn 556-557, Issue , 2007, Pages 207-210

Trends in dopant incorporation for 3C-SiC films on silicon

(8) Zielinski, M a Portail, M a Peyre, H b Chassagne, T c Ndiaye, S a Boyer, B d Leycuras, A a Camassel, J b

a CRHEA CNRS (France)

b UNIVERSITÉ MONTPELLIER 2 (France)

c SAVOIE TECHNOLAC (France)

d UNIV MONTPELLIER (France)

Author keywords

3C SiC; Compensation; N doping; SIMS

Indexed keywords

EID: 85086420864 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/0-87849-442-1.207 Document Type: Conference Paper

Times cited : (3)

References (13)

1
- 0037297058
- T. Kimoto, T. Hirao, S. Nakazawa, H. Shiomi, H. Matsunami: J. Crystal Growth Vol.249 (2002), p.208
- (2002) J. Crystal Growth , vol.249 , pp. 208
- Kimoto, T.¹ Hirao, T.² Nakazawa, S.³ Shiomi, H.⁴ Matsunami, H.⁵

2
- 0036499678
- U. Forsberg, O. Danielsson, A. Henry, M. K. Linnarsson, E. Janzen: J. Cryst. Growth Vol.236 (2002), p.101
- (2002) J. Cryst. Growth , vol.236 , pp. 101
- Forsberg, U.¹ Danielsson, O.² Henry, A.³ Linnarsson, M.K.⁴ Janzen, E.⁵

3
- 30344439122
- K. Kojima, S. Kuroda, H. Okumura, K. Arai: Microelectronic Engineering Vol.83 (2006), p.79
- (2006) Microelectronic Engineering , vol.83 , pp. 79
- Kojima, K.¹ Kuroda, S.² Okumura, H.³ Arai, K.⁴

4
- 0031536334
- D. J. Larkin: Phys. Stat. Sol. (b) Vol.202 (1997), p.305
- (1997) Phys. Stat. Sol. (b) , vol.202 , pp. 305
- Larkin, D.J.¹

5
- 36449003431
- C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, P. Pirouz: J. Appl. Phys. Vol.78 (1995), p.5136
- (1995) J. Appl. Phys , vol.78 , pp. 5136
- Zorman, C.A.¹ Fleischman, A.J.² Dewa, A.S.³ Mehregany, M.⁴ Jacob, C.⁵ Nishino, S.⁶ Pirouz, P.⁷

6
- 33749421617
- J. Chen, A. J. Steckl, M. J. Loboda: Mater. Sci. Forum Vol.338-342 (2000), p.273
- (2000) Mater. Sci. Forum , vol.338-342 , pp. 273
- Chen, J.¹ Steckl, A.J.² Loboda, M.J.³

7
- 33845588202
- In press
- J. Camassel, S. Juillaguet, M. Zielinski, C. Balloud: Chem. Vap. Deposition Vol.12 (2006) In press.
- (2006) Chem. Vap. Deposition , vol.12
- Camassel, J.¹ Juillaguet, S.² Zielinski, M.³ Balloud, C.⁴

8
- 0042681452
- B. Segall, S. A. Alterovitz, E. J. Haugland, L. G. Matus: Appl. Phys. Lett. Vol.50 (1987), p.1533
- (1987) Appl. Phys. Lett , vol.50 , pp. 1533
- Segall, B.¹ Alterovitz, S.A.² Haugland, E.J.³ Matus, L.G.⁴

9
- 38449103116
- A. Leycuras: Mater. Sei. Forum 338-348 (2000), p.241
- A. Leycuras: Mater. Sei. Forum Vol.338-348 (2000), p.241

10
- 38449112173
- Conference. To be published
- M. Zielinski, A. Leycuras, S. Ndiaye, T. Chassagne, M. Portail, R. Lewandowska, S. Juillaguet, J. Camassel: Proceedings of EXMATEC 2006 Conference. To be published.
- (2006) Proceedings of EXMATEC
- Zielinski, M.¹ Leycuras, A.² Ndiaye, S.³ Chassagne, T.⁴ Portail, M.⁵ Lewandowska, R.⁶ Juillaguet, S.⁷ Camassel, J.⁸

11
- 38449118224
- Paper WeP.26
- A. E. Bazin, T. Chassagne, J.F. Michaud, A. Leycuras, M. Portail, M. Zielinski, E. Collard and D. Alquier, Paper WeP.26, this conference.
- this conference
- Bazin, A.E.¹ Chassagne, T.² Michaud, J.F.³ Leycuras, A.⁴ Portail, M.⁵ Zielinski, M.⁶ Collard, E.⁷ Alquier, D.⁸

12
- 0038176743
- U. Forsberg, O. Danielsson, A. Henry, M. K. Linnarsson, E. Janzen: J. Crystal Growth Vol.253 (2003), p. 340
- (2003) J. Crystal Growth , vol.253 , pp. 340
- Forsberg, U.¹ Danielsson, O.² Henry, A.³ Linnarsson, M.K.⁴ Janzen, E.⁵

13
- 25444438218
- C. Sartel, V. Soulière, M. Zielinski, Y. Monteil, J. Camassel, L. Smith, S. Ruthworth, Phys. Stat. Sol. (a) 202, 550 (2005).
- (2005) Phys. Stat. Sol. (a) , vol.202 , pp. 550
- Sartel, C.¹ Soulière, V.² Zielinski, M.³ Monteil, Y.⁴ Camassel, J.⁵ Smith, L.⁶ Ruthworth, S.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.