Proposed methodology for characterization of microroughness-induced optical scatter instrumentation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2862, Issue , 1996, Pages 12-17

  Germer, Thomas A ^a   Asmail, Clara C ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

BRDF; Haze; Optical scatter; Silicon wafers; Surface roughness

Indexed keywords

DISTRIBUTION FUNCTIONS; FLAT PANEL DISPLAYS; FREQUENCY RESPONSE; SPECTRAL DENSITY; SURFACE ROUGHNESS;

BIDIRECTIONAL REFLECTANCE DISTRIBUTION FUNCTIONS; BRDF; HAZE; MICRO-ROUGHNESS; OPTICAL SCATTER; POWER SPECTRAL DENSITIES (PSD); RESPONSE FUNCTIONS; SPATIAL FREQUENCY RESPONSE;

SILICON WAFERS;

EID: 85077817861     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.256204     Document Type: Conference Paper

References (10)

1. W. M. Bullis, Microroughness of Silicon Wafers, Semiconductor Silicon/1994, H. R. Huff, W. Bergholz, and K. Surnino, ed. ESC Proceedings, 94-10, pp. 1156-69
2. E. Church, G. Sanger, and P. Takacs, Comparison of Wyko and TIS measurements of surface finish, SPIE Proceedings 749, 65 (1987).
3. F. E. Nicodemus, J. C. Richmond, J. J. Hsia, I. W. Ginsberg, and T. Limperis, Geometrical Considerations and Nomenclature for Reflectance, NBS Monograph 160 (National Bureau of Standards, Gaithersburg, 1977)
4. We use the term scatter signal since its definition differs from that of haze as outlined by the ASTM Standard E284-94a, Standard Terminology of Appearance, (American Society for Testing and Materials, Philadelphia, 1991).
5. D. E. Barrick, Radar Cross Section Handbook, (Plenum, New York, 1970).
6. S. O. Rice, Reflection of Electromagnetic Waves from Slightly Rough Surfaces, Comm. Pure and Appl. Math. 4, 351-78 (1951).
7. J. C. Stover, Optical Scattering: Measurement and Analysis, (McGraw-Hill, New York, 1990).
8. Aluminum has been shown in the past to not follow scaling laws appropriate for topographic scattering; see e.g. Ref. 7. The use of aluminum as an example is purely illustrative.
9. E. Marx, T. R. Lettieri, T. V. Vorburger, and M. McIntosh, Sinusoidal surfaces as standards for BRDF instruments, Proc. SPIE 1530, 15-21 (1991).
10. E. Marx, T. R. Lettieri, and T. V. Vorburger, Light scattering by sinusoidal surfaces: illumination windows and harmonics in standards, Appl. Opt. 34, 1269-77 (1995).