Extension of the Hopkins theory of partially coherent imaging to include thin-film interference effects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1927, Issue , 1993, Pages 452-463

  Yeung, Michael S ^a   Lee, Derek ^a   Lee, Robert ^a   Neureuther, A R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; COMPUTATION THEORY; ELASTIC WAVES; INCIDENT SOLAR RADIATION; MASKS; OPTICAL FILMS; OPTICAL SYSTEMS; PHOTORESISTS; TOPOGRAPHY; WAVE PROPAGATION;

HIGH NUMERICAL APERTURES; INTENSITY DISTRIBUTION; INTERFERENCE EFFECTS; LITHOGRAPHY SIMULATORS; PARTIALLY COHERENT IMAGING; SCATTERING , POLARIZATION; THIN-FILM INTERFERENCE; TRANSMISSION CROSS COEFFICIENT;

THIN FILMS;

EID: 85076260894     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.150443     Document Type: Conference Paper

References (14)

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