MEASUREMENT OF SHEAR STRESS AND TEMPERATURE USING MEMS FABRICATED SENSORS

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 229-233

  Breuer, Kenneth S ^a   Bayt, Robert L ^a   Nayaar, Anju ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; GAS TURBINES; GOLD DEPOSITS; MEMS; MICROSYSTEMS; SILICON NITRIDE; SUBSTRATES;

ELECTRICAL LEADS; FABRICATED SENSORS; MEASUREMENTS OF; MICROFABRICATED; PLATINUM SENSOR; SENSING AREAS; SENSOR ELEMENTS; SILICON SUBSTRATES; THIN MEMBRANE; VACUUM CAVITY;

SHEAR STRESS;

EID: 85076166775     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0272     Document Type: Conference Paper

References (5)

1. Kalvesten, E., Lofdahl, L & Stemme, G. 1996. “An Integrated Silicon Based Wall Pressure-Shear Stress Sensor for Measurement in Turbulent Flows”. Sensors andActuators.
2. Lui, C, Tai, Y-C, Huang, J-B, & Ho, C-M. 1994. “Surface Micromachined Thermal Shear Stress Sensor”. In Application of Microfabrication to Fluid Mechanics. Ed Bandyopadhyay et al. ASME FED 197.
3. Padmanabhan, A. Goldberg, H.D. Breuer. K.S. & Schmidt, M.A. 1995. “A Silicon Micromachined Floating-Element Shear-Stress Sensor with Optical Position Sensing by Photodiodes”. Proceedings of Transducers'95. Stockholm.
4. Pan, T., Hyman, D. Mehregany, M. Reshotko, E. & Willis, B. 1995. “Characterization of Microfabricated Shear Stress Sensors” 16 th International Congress on Instrumentation in Aerospace Simulation Facilities. Dayton, OH.
5. Schmidt, M., Howe, R.T., Senturia, S.D. & Haritonidis, J.H. 1988. “Design and Calibration of a Microfabricated Floating-Element Shear-Stress Sensor”. IEEE Transactions on Electron Devices. ED-35 pp.750-757.