New imaging technique for 64M-DRAM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1674, Issue , 1992, Pages 741-752

  Shiraishi, Naomasa ^a   Hirukawa, Shigeru ^a   Takeuchi, Yuichiro ^a   Magome, Nobutaka ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; IMAGING TECHNIQUES; LITHOGRAPHY;

AERIAL IMAGE CONTRAST; ANNULAR ILLUMINATION; HIGH RESOLUTION; I-LINE STEPPERS; ILLUMINATION SYSTEM; PERIPHERAL CIRCUITS; PHASE SHIFT TECHNIQUES; SINGLE-LAYER RESISTS;

DYNAMIC RANDOM ACCESS STORAGE;

EID: 85075609310     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.130364     Document Type: Conference Paper

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4. A. Suzuki. SEMI Technical Symp., pp. 69-76, 1991.
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7. H. H. Hopkins, "Wave Thory of Aberrat i ons", pp. 14, CIaredon Press, Oxford, 1950.
8. D. L. Fehrs, H. B. Lovering, and R. T. Scruton. KTI Microelectronics seminar interface'89, pp. 217.