An integrated silicon bulk micromachined barometric pressure sensor for engine control unit and external mount

SAE Technical Papers

Volumn , Issue , 1997, Pages

  Sooriakumar, K ^a   Verma, Rajan ^a   Maudie, Theresa ^a   Shah, Mahesh ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; BAROMETERS; CONTROL SYSTEMS; ENGINES; MOUNTINGS; SILICON; SURFACE MOUNT TECHNOLOGY;

ABSOLUTE PRESSURE; BAROMETRIC PRESSURE; BULK-MICROMACHINED; ENGINE CONTROL UNIT; SURFACE MOUNTING; TEMPERATURE COMPENSATION;

PRESSURE SENSORS;

EID: 85072460308     PISSN: 01487191     EISSN: 26883627     Source Type: Journal    
DOI: 10.4271/970610     Document Type: Conference Paper

References (9)

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