A silicon micromachined gyroscope and accelerometer for vehicle stability control system

SAE Technical Papers

Volumn , Issue , 2004, Pages

  Nagao, Masaru ^a   Watanabe, Hikaru ^a   Nakatani, Eiichi ^a   Shirai, Kouji ^a   Aoyama, Kouji ^a   Hasimoto, Masato ^a  

^a TOYOTA MOTOR CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CALIBRATION; CONTROL SYSTEM STABILITY; CONTROL SYSTEMS; DIGITAL TO ANALOG CONVERSION; GYROSCOPES; MICROCOMPUTERS; MICROMACHINING; MODULATORS; REACTIVE ION ETCHING; RESONATORS; SIGNAL PROCESSING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SPECIFIC VARIABLES CONTROL;

ANGULAR RATE SENSORS; DEEP REACTIVE ION ETCHING; DIGITAL CALIBRATIONS; DIGITAL DECIMATION FILTER; SIGMA DELTA MODULATOR; SILICON MICROMACHINED GYROSCOPE; SILICON MICROMACHINING; VEHICLE STABILITY CONTROL SYSTEMS;

ANALOG TO DIGITAL CONVERSION;

EID: 85072416640     PISSN: 01487191     EISSN: 26883627     Source Type: Journal    
DOI: 10.4271/2004-01-1113     Document Type: Conference Paper

References (7)

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