Embossing of microfluidic structures in ceramic multilayer

Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007

Volumn , Issue , 2007, Pages

  de Torres, Heike Bartsch ^a   Hoffmann, Martin ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

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EID: 85064657026     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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