An accurate "decoupled C-V" method for characterizing channel and overlap capacitances of miniaturized MOSFET

International Symposium on VLSI Technology, Systems, and Applications, Proceedings

Volumn , Issue , 1993, Pages 256-260

  Guo, Jyh Chyurn ^a,b   Hsu, C C H ^c   Lin, Pole Shang ^b   Chung, S S ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

MOSFET DEVICES; VLSI CIRCUITS;

BIAS DEPENDENCE; CHANNEL DOPINGS; EFFECTIVE CHANNEL LENGTH; INTRINSIC CHANNEL; OVERLAP CAPACITANCE; QUASI-STATIC C-V; SUBMICRON CHANNELS; SUBMICRON CMOS;

CAPACITANCE;

EID: 85063615704     PISSN: 19308868     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VTSA.1993.263594     Document Type: Conference Paper

References (7)

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