Development of high-performance, high-volume consumer mems gyroscopes

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 61-64

  Seeger, J ^a   Lim, M ^a   Nasiri, S ^a  

^a Invensense Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMMERCE; GYROSCOPES; MICROSYSTEMS;

CONSUMER ELECTRONICS MARKETS; DESIGN CHALLENGES; INTEGRATED MEMS; MARKET SEGMENT; MOTION PROCESSING; NASIRI FABRICATIONS; PROCESSING PLATFORM; SUCCESS FACTORS;

SOLID-STATE SENSORS;

EID: 85061808375     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.16     Document Type: Conference Paper

References (0)