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Volumn , Issue , 2018, Pages 743-757

Applications of polyimides as photosensitive materials

Author keywords

[No Author keywords available]

Indexed keywords

PHOTOPOLYMERS; PHOTORESISTS; PHOTOSENSITIVITY; POLYIMIDES;

EID: 85052880259     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1201/9780203742945     Document Type: Chapter
Times cited : (7)

References (61)
  • 3
    • 0346243264 scopus 로고
    • (G. Messner, I. Turlik, J. W. Balde, and P. E. Garrou, eds.), ISHM, Reston, VA
    • P. E. Garrou, in Thin Film Multichip Modules (G. Messner, I. Turlik, J. W. Balde, and P. E. Garrou, eds.), ISHM, Reston, VA, 1992, pp. 93-164.
    • (1992) Thin Film Multichip Modules , pp. 93-164
    • Garrou, P.E.1
  • 12
  • 25
    • 0025549246 scopus 로고
    • IEEE/ISHM’90, IEMT Symposium, Baveno, Italy
    • J.-P. Droguet, Proceedings, IEEE/ISHM’90, IEMT Symposium, Baveno, Italy, 1990, pp. 450-459.
    • (1990) Proceedings , pp. 450-459
    • Droguet, J.-P.1
  • 26
    • 85052888563 scopus 로고
    • Brochure on PIQ Polymers, Hitachi Chemical Co., Ltd, Tokyo
    • Brochure on PIQ Polymers, Hitachi Chemical Co., Ltd, Tokyo, 1990.
    • (1990)
  • 27
    • 85052866315 scopus 로고
    • Brochure on Pyralin PD Polyimide Coatings, Du Pont Electronics, Wilmington
    • Brochure on Pyralin PD Polyimide Coatings, Du Pont Electronics, Wilmington, 1988.
    • (1988)
  • 28
    • 85052849662 scopus 로고
    • Brochure on Photoneece Photosensitive Polyimides, Toray Industries Inc., Chiba
    • Brochure on Photoneece Photosensitive Polyimides, Toray Industries Inc., Chiba, 1990.
    • (1990)
  • 29
    • 85052871067 scopus 로고
    • Brochure on Probimide 400 Series, Ciba Geigy, Basel
    • Brochure on Probimide 400 Series, Ciba Geigy, Basel, 1990.
    • (1990)
  • 30
    • 85052903737 scopus 로고
    • Brochure on Selectilux HTR3, Merck Electronic Chemicals Photoresists, Darmstadt
    • Brochure on Selectilux HTR3, Merck Electronic Chemicals Photoresists, Darmstadt, 1988.
    • (1988)
  • 61
    • 85052850227 scopus 로고
    • (Y. Nissim and E. Rosencher, eds.), NATO ASI Series, Series E, Kluwer Academic Press, Dordrecht, The Netherlands
    • J. M. Bureau, in Heterostructures on Silicon (Y. Nissim and E. Rosencher, eds.), NATO ASI Series, Series E, Vol. 160, Kluwer Academic Press, Dordrecht, The Netherlands, 1988, pp. 261-272.
    • (1988) Heterostructures on Silicon , vol.160 , pp. 261-272
    • Bureau, J.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.