Piezoelectric thick film fabricated with aerosol deposition and its application to piezoelectric devices

Japanese Journal of Applied Physics

Volumn 57, Issue 7, 2018, Pages

  Akedo, Jun ^a   Park, Jae Hyuk ^a,b   Kawakami, Yoshihiro ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b RandD Center Nano Business IONES Co Ltd   (South Korea)

^c Public Interest Incorporated Foundation Research Institute for Electromagnetic Materials   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; ATMOSPHERIC MOVEMENTS; CERAMIC COATINGS; CERAMIC MATERIALS; DEPOSITION; FABRICATION; FLOW OF GASES; LOW TEMPERATURE PRODUCTION; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MOTORS; PIEZOELECTRICITY; POWDER METALS; RESPIRATORY MECHANICS; THICK FILMS;

ADDITIONAL HEATING; AEROSOL DEPOSITION METHOD; NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY; PIEZOELECTRIC ENERGY HARVESTERS; PIEZOELECTRIC THICK FILMS; PRODUCTION FACILITY; SENSOR AND ACTUATORS; TEMPERATURE IMPACT;

THICK FILM DEVICES;

EID: 85049384867     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.7567/JJAP.57.07LA02     Document Type: Article

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