Micro villus patterning (MVP) technology for 256 Mb DRAM stack cell

Digest of Technical Papers - Symposium on VLSI Technology

Volumn 1992-June, Issue , 1992, Pages 12-13

  Ahn, J H ^a   Park, Y W ^a   Shin, J H ^a   Kim, S T ^a   Shim, S P ^a   Nam, S W ^a   Park, W M ^a   Shin, H B ^a   Choi, C S ^a   Kim, K T ^a   Chin, D ^a   Kwon, O H ^a   Hwang, C G ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85029976307     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VLSIT.1992.200619     Document Type: Conference Paper

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