Integrated X-ray and charged particle Active Pixel CMOS Sensor arrays using an epitaxial silicon sensitive region

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4784, Issue , 2003, Pages 208-217

  Kleinfelder, Stuart ^a   Bichsel, Hans ^b   Bieser, Fred ^c   Matis, Howard S ^c   Rai, Gulshan ^c   Retiere, Fabrice ^c   Weiman, Howard ^c   Yamamoto, Eugene ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF WASHINGTON   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Active Pixel; CMOS; Epitaxial; Radiation; Sensor

Indexed keywords

CHARGED PARTICLES; CMOS INTEGRATED CIRCUITS; ECONOMIC AND SOCIAL EFFECTS; ELECTRON SOURCES; EPITAXIAL GROWTH; GAMMA RAYS; GERMANIUM COMPOUNDS; HEAT RADIATION; IRON COMPOUNDS; PARTICLE SIZE ANALYSIS; PIXELS; SENSORS; SIGNAL TO NOISE RATIO; SILICON; X RAYS;

ACTIVE PIXEL; CMOS ACTIVE PIXEL SENSORS; CMOS SENSOR ARRAYS; CONTACT STRUCTURE; EPITAXIAL; EPITAXIAL SILICON; PEAK SIGNAL INTENSITIES; POSITION RESOLUTION;

X RAY DETECTORS;

EID: 85028988120     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.450826     Document Type: Conference Paper

References (8)

1. E. Fossum, Active Pixel Sensors: are CCD s Dinosaurs? in Proc. SPIE vol. 1900, pages 2-14, Feb. 1993.
2. H.-S. Wong, Technology and Device Scaling Considerations for CMOS Im agers, IEEE Transactions on Electron Devices, vol. 43, no. 12, pages 2131-2142, Dec. 1996.
3. M. S. Alam, et al, The Atlas Silicon Pixel Sensors, Nuclear Instruments and Methods A456 pages 217-232, 2001.
4. B. Dierickx, G. Meynants, D. Scheffer, Near 100% fill factor CMOS active pixels, IEEE CCD & AIS workshop, Brugge, Belgium, 5-7 june (1997); Proceedings p. P1
5. G. Meynants, B. Dierickx, and D. Scheffer, CMOS active pixel image sensor with CCD performance, AFPAEC Europto/SPIE, Zurich, 18-21 may 1998; proc. SPIE, vol. 3410, pp. 68-76, 1998.
6. R. Turchetta, et al., A Monolithic Active Pixel Sensor for Charged Particle Tracking, Nucl. Instrum. and Methods A, 458, 8 (2001).
7. N. Stevanovic, M. Hillegrand, B. J. Hostica, A. Teuner, A CMOS Image Sensor for High Speed Imaging, ISSCC Digest of Technical Papers, pages 104-105, San Francisco, CA, Feb. 2000.
8. S. Kleinfelder, S. Lim, X. Liu, A. El Gamal, A 10k frames/s 0.18 m CMOS Digital Pixel Sensor, IEEE Journal of Solid State Circuits, Vol. 36, No. 12, December 2001.