Optimization of Sensing Stators in Capacitive MEMS Operating at Resonance

Journal of Microelectromechanical Systems

Volumn 24, Issue 4, 2015, Pages 1077-1084

  Frangi, Attilio ^a   Laghi, Giacomo ^a   Langfelder, Giacomo ^a   Minotti, Paolo ^a   Zerbini, Sarah ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

capacitive readout.; Damping coefficient; MEMS sensors; quality factor

Indexed keywords

CAPACITIVE SENSORS; DAMPING; ELECTROMECHANICAL DEVICES; MEMS; MICROMACHINING; STATORS; SURFACE MICROMACHINING;

CAPACITIVE READOUT; DAMPING COEFFICIENTS; FINITE ELEMENT METHOD MODELS; MEMS SENSORS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); QUALITY FACTORS; SENSITIVITY IMPROVEMENTS; SURFACE MICROMACHINING PROCESS;

FINITE ELEMENT METHOD;

EID: 85027929087     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2381515     Document Type: Article

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