Controlled Wafer Release in Clustered Photolithography Tools: Flexible Flow Line Job Release Scheduling and an LMOLP Heuristic

IEEE Transactions on Automation Science and Engineering

Volumn 12, Issue 2, 2015, Pages 642-655

  Park, Kyungsu ^a   Morrison, James R ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Clustered photolithography tools; flexible flow lines; job release scheduling; lexicographic multiple objective linear programming; semiconductor wafer manufacturing

Indexed keywords

HEURISTIC PROGRAMMING; JOB SHOP SCHEDULING; LINEAR PROGRAMMING; MANUFACTURE; PETRI NETS; PHOTOLITHOGRAPHY; SCHEDULING; SILICON WAFERS; THROUGHPUT;

BOTTLENECK PROCESS; FLEXIBLE FLOW LINE; MAXIMIZE THROUGHPUT; MULTIPLE OBJECTIVE LINEAR PROGRAMMING; MULTIPLE OBJECTIVE LINEAR PROGRAMS; RELEASE METHODS; ROBOT HANDLING; SEMI-CONDUCTOR WAFER;

HEURISTIC METHODS;

EID: 85027923994     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2014.2311997     Document Type: Article

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