Photon shield for atomic hydrogen plasma sources

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 2, 1999, Pages 670-672

  Nienhaus, H ^a,b,c   Gergen, B ^a   Bergh, H S ^a   Majumdar, A ^d   Weinberg, W H ^a   Mcfarland, E W ^a  

^a University of California   (United States)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

^c NONE

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85024821734     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.581635     Document Type: Letter

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