Investigation of electron induced damaging of molecular overlayers by imaging static secondary ion mass spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3449-3454

  Rading, D ^a   Liebing, V ^a   Becker, G ^a   Fuchs, H ^a   Benninghoven, A ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85024785825     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.581501     Document Type: Article

References (16)

1. G. Egbers, D. Rading, K. Stoppek-Langner, J. Grobe, and A. Benninghoven, Secondary Ion Mass Spectrometry (SIMS X), edited by A. Benninghoven, B. Hagenhoff, and H. W. Werner (Wiley, Chichester, 1997), 763.
2. K. M. Leufgen, H. Rulle, H.-J. Galla, M. Sieber, and A. Benninghoven, in Ref. 1, p. 957.
3. J. Schwieters, H.-G. Cramer, T. Heller, U. Jürgens, E. Niehues, J. Zehnpfenning, and A. Benninghoven, J. Vac. Sci. Technol. A JVTAD6 9, 2864 (1991).
4. J. Schwieters, H.-G. Cramer, U. Jürgens, E. Niehues, H. Rulle, T. Heller, J. Zehnpfenning, and A. Benninghoven, Secondary Ion Mass Spectrometry (SIMS VIII), edited by A. Benninghoven, K. T. F. Janssen, J. Tümpner, H. W. Werner (Wiley, Chichester, 1992), 497.
5. D. van Leyen, B. Hagenhoff, E. Niehuis, A. Benninghoven, I. V. Bletsos, and D. M. Hercules, J. Vac. Sci. Technol. A JVTAD6 7, 1790 (1989).
6. I. V. Bletsos, D. M. Hercules, D. Fowler, D. van Leyen, and A. Benninghoven, Anal. Chem. ANCHAM 62, 1275 (1990).
7. S. M. Hues, J. R. Wyatt, R. J. Colton, and B. H. Black, Anal. Chem. ANCHAM 62, 1074 (1990).
8. H. Feld, A. Leute, D. Rading, A. Benninghoven, M. P. Charelli, and D. M. Hercules, Anal. Chem. ANCHAM 65, 1729 (1993).
9. L. Reimer, Scanning Electron Microscopy (Springer, Berlin, 1985), 125.
10. P. Sigmund, Secondary Ion Mass Spectrometry (SIMS IV), edited by A. Benninghoven, J. Okano, R. Shimizu, and H. W. Werner (Springer, Berlin, 1984), 2.
11. A. Benninghoven, F. G. Rüdenauer, and H. W. Werner, Secondary Ion Mass Spectrometry (Wiley, New York, 1987), 677.
12. J. I. Goldstein, D. E. Newbury, P. Echlin, D. C. Joy, A. D. Romig, Jr., C. E. Lyman, C. Fiori, and E. Lifshin, Scanning Electron Microscopy and X-Ray Microanalysis (Plenum, New York, 1992), 110.
13. H. Drescher, L. Reimer, and H. Seidel, Z. Angew. Phys. ZAPHAX 29, 331 (1970).
14. H. A. Bethe, Ann. Phys. (Leipzig) ANPYA2 5, 325 (1930).
15. L. Reimer, Transmission Electron Microscopy, 2d ed. (Springer, Berlin, 1986), 446.
16. D. Rading, R. Kersting, and A. Benninghoven, J. Vac. Sci. Technol. A (submitted).