Vapor Sensing by Means of a ZnO-on-Si Surface Acoustic Wave Resonator

Proceedings - IEEE Ultrasonics Symposium

Volumn 1984-November, Issue , 1984, Pages 207-212

  Martin, S J ^a   Schweizer, K S ^a   Schwartz, S S ^b   Gunshor, R L ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; II-VI SEMICONDUCTORS; MOLECULES; PHOTOACOUSTIC EFFECT; RESONATORS; SURFACE WAVES; TRANSIENT ANALYSIS; WAVE PROPAGATION; ZINC OXIDE;

ADSORBED MOLECULES; ADSORPTIVE PROPERTIES; FREQUENCY COUNTERS; POLYCRYSTALLINE ZNO; RESONANT FREQUENCY SHIFT; SENSITIVE DETECTOR; SURFACE ACOUSTIC WAVES; SURFACE WAVE VELOCITY;

NATURAL FREQUENCIES;

EID: 85022676836     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.1984.198291     Document Type: Conference Paper

References (13)

1. A. D'Amico, A. Palma, and, E. Verona, 1982 Ultrasonics Symposium Proceedings (IEEE, New York, 1982) p. 308.
2. A. Bryant, D. L. Lee, J. F. Vete-lino, 1981 Ultrasonics Symposium Proceedings (IEEE, New York, 1981) p. 171.
3. H. Wohltjen and R. Dessy, Analytic Chemistry, 5JU 1465 (1979).
4. S. J. Martin, S. S. Schwartz, R. L. Gunshor and R. F. Pierret, J. Appl. Phys. 54, 562 (1983).
5. S. J. Martin, R. L. Gunshor and R. F. Pierret, 1980 Ultrasonics Symposium Proceedings (IEEE, New York, 1980) 113.
6. R. E. Watson, M. L. Perlman and J. W. Davenport, Surface Science, 115, 117 (1982).
7. B. A. Auld, Acoustic Fields and Waves in Solids, Vol. 2, (John Wiley and Sons, New York, 1973) Ch. 12.
8. We are indebted to Prof. Supriyo Datta of Purdue University for this calculation.
9. S. Datta and B. J. Hunsinger, J. Appl. Phys., j0, 5661 (1979).
10. H. Wohltjen, Sensors and Actuators, 5, 307 (1984).
11. E. A. Flood, The Solid-Gas Interface, (Marcel Dekker, New York, 1967) Vol. I, Ch. 3.
12. J. H. DeBoer, The Dynamical Character of Adsorption, (Clarendon Press, Oxford, 1968), Ch. 10.
13. K. H. Altgelt and L. Segal, Gel Permeation Chromatography, (Marcel Dekker, New York, 1971).