High performance bimorph piezoelectric MEMS harvester via bulk PZT thick films on thin beryllium-bronze substrate

Applied Physics Letters

Volumn 111, Issue 1, 2017, Pages

  Yi, Zhiran ^a,b   Yang, Bin ^a,b   Li, Guimiao ^a,b   Liu, Jingquan ^a,b   Chen, Xiang ^a,b   Wang, Xiaolin ^a,b   Yang, Chunsheng ^a,b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b Shanghai Jiao Tong University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BERYLLIUM; BRONZE; HARVESTERS; PIEZOELECTRICITY; THICK FILMS;

ACCELERATION AMPLITUDE; AT RESONANCE; EFFECTIVE VOLUME; GOOD STABILITY; LOAD RESISTANCES; PEAK-TO-PEAK VOLTAGES; PIEZOELECTRIC MEMS; POWER DENSITIES;

LIGHT EMITTING DIODES;

EID: 85022079716     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4991368     Document Type: Article

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