Accurate velocity measurements of AFM-cantilever vibrations by doppler interferometry

Journal of Experimental Nanoscience

Volumn 1, Issue 1, 2006, Pages 51-62

  Portolés, José F ^a   Cumpson, Peter J ^b   Hedley, John ^c   Allen, Stephanie ^a   Williams, Philip M ^a   Tendler, Saul J B ^a  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

^b NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^c NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

AFM; Calibration; Doppler; MEMS; Traceability; Vibration

Indexed keywords

EID: 85017591661     PISSN: 17458080     EISSN: 17458099     Source Type: Journal    
DOI: 10.1080/17458080500411999     Document Type: Article

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