Magnetic properties of thick sputter deposited SmCo films for MEMS-applications

INTERMAG Europe 2002 - IEEE International Magnetics Conference

Volumn , Issue , 2002, Pages

  Budde, T ^a   Gatzen, H H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; MAGNETIC FILMS; MAGNETIC MATERIALS; MAGNETIC PROPERTIES; MAGNETIC THICK FILMS; MAGNETISM;

ATTRACTIVE FORCE; ENERGY PRODUCTS; HARD MAGNETIC FILM; HARD MAGNETIC MATERIAL; MAGNETIC BEHAVIOR; MEMS APPLICATIONS; PERPENDICULAR MAGNETIZATION; VARIABLE RELUCTANCE;

MAGNETIC ACTUATORS;

EID: 85017202193     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/INTMAG.2002.1001427     Document Type: Conference Paper

References (2)

1. Gatzen, H.H., Stölting, H.-D., Büttgenbach, S., and Dimigen, H.: A novel variable reluctance micromotor for linear actuation, Proceedings, Actuator 2000, Bremen, pp. 363-366, 2000
2. T. Budde; H.H. Gatzen; "Patterned sputter deposited SmCo-layers for MEMS-applications"; accepted for Journal of Magnetism and Magnetic Materials, April 2002