Dissipation in single-crystal 3c-sic ultra-high frequency nanomechanical resonators

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 86-89

  Feng, X L ^a   Zorman, C A ^b   Mehregany, M ^b   Roukes, M L ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ENERGY DISSIPATION; MICROSYSTEMS; NATURAL FREQUENCIES; RESONATORS; SILICON CARBIDE; SILICON COMPOUNDS; SINGLE CRYSTALS; TEMPERATURE DISTRIBUTION;

DIMENSIONAL EFFECTS; DOUBLY CLAMPED BEAM; NANOMECHANICAL RESONATORS; POSSIBLE MECHANISMS; RESONANCE FREQUENCIES; TEMPERATURE COEFFICIENT; TEMPERATURE DEPENDENCE; ULTRA-HIGH FREQUENCY;

SOLID-STATE SENSORS;

EID: 85017029116     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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