Dynamic modeling for the design and cyclic operation of an atomic layer deposition (ALD) reactor

Processes

Volumn 1, Issue 2, 2013, Pages 128-152

  Travis, Curtisha D ^a   Adomaitis, Raymond A ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

ALD; Alumina; Atomic layer deposition; Growth per cycle; Heterogeneous reaction kinetics; Limit cycle; Reaction mechanism; Reactor dynamics; Time discretization; Transition state theory

Indexed keywords

EID: 85015469129     PISSN: None     EISSN: 22279717     Source Type: Journal    
DOI: 10.3390/pr1020128     Document Type: Article

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