An xytheta/actuator using piezoelectric and electromagnetic actuators

MHS 1997 - Proceedings of 1997 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1997, Pages 85-90

  Torii, A ^a   Kato, H ^a   Hayakawa, K ^a   Ueda, A ^a  

^a AICHI INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); ELECTRIC ACTUATORS; ELECTROMAGNETS; MICROSENSORS; PIEZOELECTRICITY; PRECISION ENGINEERING;

DEGREE OF FREEDOM; ELECTROMAGNETIC ACTUATORS; HIGH RESOLUTION; MICRO-TOOL; MULTI DEGREES OF FREEDOM; PRECISE POSITIONING;

PIEZOELECTRIC ACTUATORS;

EID: 85014027452     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.1997.768862     Document Type: Conference Paper

References (6)

1. Singeo Moriyama, "One Design Procedure for Precision Positoning Mechanims", Journal of the Japan Society for Precision Engineering Vol.54, pp.1788-1793(1988) [in Japanese]
2. Hirosi Mizumoto, et al., "A Summarized Comparison of Feed Drive Devices for Ultra Precision Positioning Systems", proc. of the 8th Int. Prec. Eng. seminar, PP.217-228(1995)
3. Yuichi Okazaki, "A Micro Positioning Tool Post using a Piezoelectric Actuator for Diamond Turning Machines", Journal of the Japan Society for Precision Engineering Vol.54, pp.l375-1380(1988) [in Japanese]
4. "High-Rigidity Multi-Degree-of Freedom Fine Motion Mechanism using Piezoelectric Actuators(3rd Report)" Journal of the Japan Society for Precision Engineering Vol.63, pp.223-227(1997) [in Japanese]
5. Toshiro Higuchi, et al., "Precise Positioner Utilizing Rapid Deformations of a Piezoelectric Element", Journal of the Japan Society for Precision EngineeringVol.54, pp.2107-2112(1988) [in Japanese]
6. Hisayuki Aoyama, et al., "Navigation and Formation Control for Distributed Miniature Robots with Micro Tool and sensor", proc. of the Sixth Int. Symp. on Micro Machine and Human Science, pp.255-260(1995)