Microwave photonic applications of MEMS technology

International Topical Meeting on Microwave Photonics, MWP 1999

Volumn , Issue , 1999, Pages 109-112

  Tangonan, G ^a   Loo, R ^a   Schaffner, J ^a   Lee, J J ^a  

^a Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS TECHNOLOGY; MICROWAVE PHOTONIC APPLICATIONS; RF PHOTONICS; RF-MEMS; RF-MEMS SWITCHES; SWITCHABLE ANTENNAS; TUNABLE FILTERS;

EID: 85013974367     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWP.1999.819663     Document Type: Conference Paper

References (5)

1. LARSON, L., HACKETT, R., LOHR, R.: Microactuators for GaAs-Based Microwave Integrated Circuits, Proceed. Transducers 97, 1991 , pp. 743-746.
2. HACKETT, R., LARSON, L., MELENDE, M.:, The Integration Of Micro-Machine Fabrication with Electronic Device Fabrication on Ill-V Semiconductor Materials, Proceed. Transducers 97, 1991, pp. 51-54.
3. YAO, J., CHANG, M.: A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC up to 4 GHz, Proceed. Transducers 95, 1995, pp. 384-387.
4. GOLDSMITH, C., RANDALL, J., ESHELMAN, S., LIN, T., DENNISTON, D., CHEN, S., NORVELL, B.: Characteristics of Micromachined Switches at Microwave Frequencies, Proceed. /E MTTS, 1995, pp. 1141-1 144.
5. D. HYMANA, . SCHMITZ, B . WARNEKET, . Y. Hsu, J. LAM, J . BROWNJ, . SCHAFFNERA, . WALSTONR, . Y. LOO, G . L. TANGONANM, . MEHREGANYJ., J. LEE: GaAs Compatible Surface Micromachined RF MEMs Switch, Electronics Lett., 35, 1-2 (1999)